Technology and R&D
R&D Policy
Key Technologies
Development Roadmap
List of Awards & Papers
R&D Policy
Companies in the semiconductor manufacturing industry tend to be fragmented into different types of businesses. On the other hand, there are also integrated makers of semiconductor manufacturing equipment. NuFlare Technology is one such manufacturer. Specializing in the development and production of semiconductor manufacturing equipment, we are committed to ongoing research and development. Our particular mission is to maintain our leading position in the world in the world-class microfabrication technology.
NuFlare Technologyfs gDesign for Manufacturingh
 
To achieve the high performance, advanced functionality, and low power dissipation demanded by todayfs LSIfs, geometry reduction is essential. However, because reduced geometry triggers new flaw mechanisms and brings out numerous error factors, controlling the manufacturing process becomes difficult and impacts semiconductor yields. For this reason, calls have arisen for integrated optimization of the whole fabrication process, from LSI design to manufacture. The Design for Manufacturing (DFM) approach focuses on optimizing design and manufacture in a balanced way, and facilitating fabrication. DFM seeks to jointly develop breakthrough technologies through a process of mutual collaboration among semiconductor makers, materials makers, device makers, and others working as partners, and to devise solutions. Our electron beam mask writer is a core manufacturing device positioned in the upstream stage of the semiconductor manufacturing process. We cultivate ties with the semiconductor makers who are the users of our products, control the dimensional accuracy variation of the circuit patterns printed onto the photomask, and conduct R&D that leads to further geometry reduction. There are many semiconductor-related makers throughout the world, and each has a different role to play. Amongst this diversity, our goal is to be the only semiconductor manufacturing systems specialist with electron beam mask writers as its core product. By being a professional R&D and manufacturing company that attracts people seeking the highest goals, and by exploring next-generation technologies through submitting our proposals to large semiconductor makers, we are committed to being the best worldwide. The professionals in multiple fields who support our Design for Manufacturing concept offer next-generation semiconductor solutions.