Mask Inspection System NPI-6000
High Productivity Mask Inspection System |
| The most advanced high throughput Mask Inspection System hNPI-6000 h for hp32nm design rule. |
Features |
1) 199nm wavelength light source.
2) High speed concurrent Reflection/Transmission inspection within 120 minutes.
3) High sensitivity to enables inspection of the most advanced photomasks.
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Key Parameters |
| Mask size |
6inch |
| Wavelength |
199nm |
| Inspection time |
120minutes |
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