Epitaxial Reactors

HT2000FD Single Wafer Epitaxial Reactor

8" Single Wafer Si Epitaxial Reactor

HT2000FD

HT2000FD deposits high quality silicon epitaxial films at a low cost, contributing to improved performance and cost reduction of power devices.

EPIREVO S6 Single Wafer Epitaxial Reactor

4"/6" Single Wafer SiC Epitaxial Reactor

EPIREVO™ S6

EPIREVO™ S6 6 inch single-wafer SiC Epitaxial Reactor delivers improved performance and cost reduction of SiC power devices.

EPIREVO G8 Single Wafer MOCVD

6"/8" Single Wafer GaN-on-Si MOCVD

EPIREVO™ G8

GaN has attracted attention as an LED and a next generation power device material. The EPIREVO™ G8 MOCVD system deposits GaN films on eight inch Si substrates.

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